GEM300 Standards White Paper

With the transition to 300mm wafers, the level of factory automation in the fabs increased significantly. SEMI introduced the GEM300 standards to allow this dramatic change to be implemented as cost effectively as possible. Cimetrix has established itself as the leading independent provider of software to enable production tools to be compliant with the SEMI 300mm standards.

Here's what you'll learn:

  • Become familiar with the basic capabilities of the SEMI GEM300 core standards
  • Learn details the GEM300 objects, attributes, state models and service messages
  • Understand the functional relationship between the GEM300 standards
  • See examples of GEM300 objects, attributes, state models and service messages

Find out more by selecting from the material available or schedule a meeting with a Cimetrix representative.

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