SEMI EDA/Interface A Software Products and Tools

Product	EDA/Interface A Standards	Description
CIMPortal™ Plus	SEMI E120 Specification for the Common Equipment Model (CEM) SEMI E121 Guide for Style and Usage of XML for Semiconductor Manufacturing Applications SEMI E125 Specification for Equipment Self Description (EqSD) SEMI E128 Specification for XML Message Structures SEMI E132 Specification for Equipment Client Authentication and Authorization SEMI E134 Specification for Data Collection Management SEMI E138 XML Semiconductor Common Components SEMI E147 Guide for Equipment Data Acquisition (EDA) SEMI E157 Specification for Model Process Tracking SEMI E164 Specification for EDA Common Metadata	Software development kit for equipment suppliers to implement Equipment Data Acquisition (EDA) such as the SEMI Interface A standards and local historical databases that follow the TDI (Tool Data Interface) guidelines. Provides a high speed data collection framework and a complete set of equipment modeling design and deployment tools. May also be used directly by Integrated Device Manufacturers with existing equipment SECS/GEM interfaces to generate data collection reports without consuming the SECS/GEM interface. Visit the CIMPortal Plus Resources page.
EDAConnect™	SEMI E120 Specification for the Common Equipment Model (CEM) SEMI E121 Guide for Style and Usage of XML for Semiconductor Manufacturing Applications SEMI E125 Specification for Equipment Self Description (EqSD) SEMI E128 Specification for XML Message Structures SEMI E132 Specification for Equipment Client Authentication and Authorization SEMI E134 Specification for Data Collection Management SEMI E138 XML Semiconductor Common Components SEMI E147 Guide for Equipment Data Acquisition (EDA)	Software library for applications to implement the client-side of the Equipment Data Acquisition (EDA) SEMI standards also known as Interface A. High performance .NET assembly provides a version-independent abstraction layer and implements the client-side web service. EDAConnect also includes .NET forms to simplify GUI development in EDA client applications. Visit the EDAConnect Resources page.
ECCE™ Plus	SEMI E120 Specification for the Common Equipment Model (CEM) SEMI E121 Guide for Style and Usage of XML for Semiconductor Manufacturing Applications SEMI E125 Specification for Equipment Self Description (EqSD) SEMI E128 Specification for XML Message Structures SEMI E132 Specification for Equipment Client Authentication and Authorization SEMI E134 Specification for Data Collection Management SEMI E138 XML Semiconductor Common Components SEMI E147 Guide for Equipment Data Acquisition (EDA)	Orginally developed with SEMATECH as the official Equipment Data Acquisition (EDA) reference client for validating a web server that implements the SEMI EDA/Interface A standards. Cimetrix continued to invest in the extension and development of this emulator to provide a solution for both Freeze Version I (1105) and Freeze Version II (0710).
Cimetrix EDATester™	SEMI E120 Specification for the Common Equipment Model (CEM) SEMI E125 Specification for Equipment Self Description (EqSD) SEMI E132 Specification for Equipment Client Authentication and Authorization SEMI E134 Specification for Data Collection Management SEMI E164 EDA Common Metadata	Organizes, streamlines, and automates the testing process while also providing other analytical capabilities. Uses ISMI's EDA Evaluation Method, and implements compliance tests that are automated for all client-side actions. Also includes a highly configurable performance testing capability that enables the user to characterize interface performance across a wide variety of data collection parameter settings. Visit the EDATester Resources page.