Industry News, Trends and Technology, and Standards Updates

By David Francis
Product Manager

I ran across an old issue of Future Fab International – Issue 6 – that I have had since it was published in 1998. I helped write an article that was published in this issue titled “Complete System Integration is Crucial to the Success of 300mm Manufacturing.” The article looked at changes that would be required in semiconductor manufacturing to support the move from 200mm wafers to 300mm wafers.

At the time, I was working for a software company that specialized in the development of Material Control Systems (MCS) for controlling Automated Material Handling Systems (AMHS). Most of the 200mm manufacturing facilities had implemented inter-bay transport systems that move material from one manufacturing bay to another, but within the bays, operators manually loaded wafers onto process or metrology equipment. Operators had to decide what work should be done next, or where the material should go after each process, after reviewing choices from a dispatch screen. There were islands of automation, but not much integration.

With the size, weight, and bulk of the 300mm carriers, transport systems would need to deliver material directly to the processing or metrology tool. This required very tight integration between the MCS, the dispatching system, and the factory Manufacturing Execution System (MES). In 1998 the GEM300 standards that would make all this possible had not been adopted very widely yet and were only starting to get semiconductor equipment suppliers’ attention.

This old article talked about the need for developing a reliable, low-footprint intra-bay transport system. It also explored the new concept of having the dispatch system make the decision about what work to do next rather than just suggesting what could be done. The MCS would need to interface with the dispatching system to be able to position material close to where it would be needed for processing.

The SEMI GEM 300 standards started gaining traction about the year 2000 and the idea of “lights out” manufacturing soon became a reality. It has been exciting to watch as the MES, dispatcher, AMHS and MCS systems have progressed and the fully automated, integrated manufacturing environment described in the article has become a reality.

While the move to 450mm wafers is probably still a few years off, I expect that transition will be much easier than the transition from 200mm to 300mm because of the work done for 300mm factories. The standards are well established, the control systems have matured, and the integration of the various components is very stable. It is exciting to see these future visions become common practice.

Recently, Cimetrix updated our Introduction to SEMI GEM 300 Standards white paper.  We have refreshed the content to answer some of the questions many people pose to us. Take a look and let us know what you think.

by Rob Schreck
Cimetrix Marketing Manager

We are seeing a significant increase in interest in the SEMI EDA/Interface A standards because semiconductor fabs have recognized they can turn the available data into useful and actionable information. For example, take a look at the recent blog post from David Francis on the adoption of EDA. One of the most important aspects of the use of the Interface A standards is that the semiconductor fabs and equipment suppliers need to communicate clearly with each other about which freeze version they will implement and how they will go about testing the connection.

Because of the Cimetrix experience and expertise in the use of, and software to implement, this standard, we are in a position to support the engineering community as they learn more about what is required to comply with EDA/Interface A.

We have recently updated our white paper on the Introduction to the SEMI EDA/Interface A standards white paper, and we encourage everyone using standards or finding out more about them to download the white paper.

By David Francis
Product Manager

This is an exciting time for Cimetrix as we see equipment suppliers and semiconductor fabs adopt the SEMI Equipment Data Acquisition (EDA)/Interface A standards. As equipment suppliers use our CIMPortal™ Plus software development kit, and fabs use our EDAConnect™ and ECCEsoftware, there is a growing awareness of how fabs can use the increased data that they gather to improve productivity and reduce unit costs.

One thing for certain is that equipment suppliers and semiconductor fabs need to communicate with each other effectively regarding their plans for implementing EDA. This includes determining which EDA Freeze Version they will use, freeze version 1105, freeze version 0710, or perhaps a mixture of both depending on tool type. The fab will also need to specify their equipment acceptance criteria. The acceptance tests need to be comprehensive, but optimized to keep the overall installation cost at a minimum.

To support equipment integration into the fab, the EDA interface can provide descriptions of the equipment's structure and behavior to the factory control systems. These metadata sets include the equipment components, the events and exceptions that can be reported, and all the available data parameters. A predictable and reliable interface definition enables faster equipment integration and lower installation cost.

To help ensure consistent metadata, ISMI is providing a tool to check for conformance of equipment metadata to EDA standards (such as E120 Specification of the Common Equipment Module and the E125Specification for Equipment Self-Description) and EDA guidelines. 

Cimetrix was at the forefront of the EDA/Interface A standards development and continues to be involved with the efforts around the new standards and the creation of the new EDA Client Connection Emulator (ECCE) version 2, which supports both 1105 and 01710 versions of the standards. It is great to see the broader adoption of the standards and the recognition of how the standards can help increase fab productivity.

To read more about SEMI EDA/Interface A standards, visit ourEDA/Interface A web page.

By David Francis

Product Manager

ISMI held a very successful EDA/Interface A workshop at SEMICON West in July, and Cimetrix was a guest speaker at the workshop.  The attendance and interest in EDA was surprising, given that EDA has been discussed for five years with very little adoption to-date.  Now, however, we see a major change occurring.

In November 2005, ISMI established the first freeze version of the Equipment Data Acquisition (EDA) Standards to enhance adoption by eliminating the “moving target” issue; it was known as the 1105 Freeze Version. The industry had good reasons for developing EDA. Fabs could get significantly higher trace data collection throughput, and the robust tool model in EDA provided better access to sensors and other key equipment variables useful for operational data monitoring.  Moreover, EDA greatly simplified the creation of data collection plans (DCP), so fab engineers could resolve manufacturing problems faster and easier. Best of all, it decoupled data collection from SECS/GEM, so data collection would not be influenced by tool control nor would tool control performance be impacted by collection of large quantities of data.  The result would be that fabs would benefit from more sophisticated automatic process control (APC) algorithms, improved yields, and reduced downtime.

Unfortunately, only a few brave equipment suppliers started work on developing interfaces for their equipment to comply with the 1105 Freeze Version. Not surprisingly, the general adoption and excitement in the industry around EDA didn’t last long in the absence of strong support from semiconductor manufacturers and foundry customers.

Why? It generally takes a significant amount of time for equipment suppliers and semiconductor manufacturers to review the standards and introduce new systems to deliver and consume the data. In the case of EDA this was further compounded because of bad timing in the industry.  The 1105 freeze version of EDA came out during a boom time for the semiconductor industry, when fabs want to avoid making significant changes that could disrupt production.  By the time the equipment vendors could develop new systems with an EDA interface, the industry experienced the biggest – and fastest – downturn in history.  In 2008-2009, semiconductor companies were buying very few new machines, let alone starting new fabs.

But, when business in the industry turned back up in 2010, both GLOBALFOUNDRIES and Toshiba announced they would build new 300mm fabs, and would require OEMs to supply new equipment with an EDA interface.  In addition, there are other semiconductor manufacturers and foundries who are investigating and starting to use EDA, but have not been as vocal about adopting the standard.

 GLOBALFOUNDRIES Fab 1 in Dresden, Germany

Also in 2010, ISMI announced the second freeze version (the 0710 Freeze Version) of the EDA Standards. Since that announcement, there has been a lot of interest and activity in the industry surrounding Interface A. One reason, obviously, is that the two large semiconductor manufacturers have added Interface A to their equipment purchase specifications and acceptance criteria, so equipment suppliers want to ensure that their products comply with these new requirements.

But there are other reasons for interest in EDA.  The 0710 freeze version provides a number of simplifications and clarifications of the 1105 freeze version. For example, there is better linkage between the SECS/GEM events and variables and the EDA constructs, and the metadata is simpler. There have also been other changes, like using simple events as an alternative to complete state machines, and allowing DCP behavior to be separate for each client. As the industry tackles 3D designs with ever smaller geometries, the process window gets a lot narrower and access to data and applications to consume this data become imperatives instead of “nice-to-haves.”

In addition, ISMI has updated its EDA Guidance document to more fully describe how to implement EDA interfaces. In parallel, ISMI partnered with Cimetrix to develop the new version of the Equipment Client Connection Emulator (ECCE) that OEMs and semiconductor manufacturers can use to verify EDA interfaces (see New Freeze Version of Interface A Requires New ECCE Version). Finally, the ISMI/NIST Metadata Conformance Analyzer (MCA) is also available to check for conformance of equipment metadata to the applicable portions of the SEMI standards and ISMI guidelines.

It is exciting to see the renewed interest and attention to EDA. Is all the attention because semiconductor manufacturers are starting to require EDA, or are semiconductor manufacturers starting to require it because of all the recent interest? Either way, there are genuine opportunities for both equipment suppliers and semiconductor manufacturers to make use of data collected through EDA to improve efficiencies and open new capabilities for microelectronics manufacturing.

By: Bill Grey
Director of R&D, Cimetrix Inc.

One of the hurdles people new to the semiconductor equipment industry need to overcome is learn how to establish a physical connection between the fab network and new equipment.  To help people, we have developed a primer to provide the foundation for how to do that.

The primer provides a background for SECS/GEM communication over HSMS by describing how to configure the connections, the terminology involved, troubleshooting, and common messages.

In a factory SECS/GEM implementation, there are two parties, the host, and equipment.  The equipment runs GEM interface software, which must implement and comply with the SEMI standards, on one of its computers.  The manufacturer (factory) runs GEM host software that establishes communication with the equipment's GEM interface.

The SECS Messaging Primer is a companion to the Introduction to the SECS/GEM standard white paper available on the Cimetrix SEMI Standards web page.  That white paper provides an overview of the SEMI SECS/GEM standard. 

by Dave Faulkner,
EVP, Sales & Marketing

Engineers love data. Business people love information. But it all starts with high-quality, real-time data. The possibilities are endless with good data.

As an equipment supplier, history probably has you living with a tool architecture from the early 300mm days. The focus was on implementing AMHS systems and meeting the GEM300 standards. A data driven architecture wasn't on the radar screen. And it wasn't a business priority. Times have changed. Fabs started asking for more data by creating the SEMI Interface A standards - and equipment suppliers are learning they can produce more productive equipment by leveraging the right data.

Interface A was an interesting concept when it started in the early 2000s. Discoverable data available to the fabs in real time would seem to be the answer to many problems. But the adoption has been less than stellar - even with strong endorsement and technical support by ISMI. Lack of fab side applications plumbed to use the Interface A data and "ownership" issues of the data haven't helped. These are real business problems that must be solved and will be solved with the next wave of fab purchases.

But what have we learned as equipment suppliers and software providers? Tool data models are helpful. Self description is great. We can create high performance data gathering applications that integrate with existing tool control architectures to make data available and controllable by the equipment supplier. Look at the performance of CIMPortal, our comprehensive equipment data acquisition (EDA) solution. We also learned that given the opportunity to "start over", we can create new tool control architectures that are data driven and prepared for the future. Look at CIMControlFramework. So the data is available - or you can make it available with an existing or new tool control architecture.

Let's put this data to work. Either to benefit you as the tool supplier or to help your customer. How is your tool accepted at the fabs? Do you have contingencies on your customer's payments? Does tool uptime have an impact on the tool price? Are your warranty costs too high? You get the point. With high-quality, real-time data at our fingertips, we can solve some of these business issues. We are at the beginning of a phase where the tool supplier makes use of this data and it directly impacts business results. Tool side fault detection, preventative maintenance, whatever is needed. The important point is we are finally starting from a strong foundation with the right data at the right time - and it can lead to increased margins or higher levels of customer satisfaction. Bring us your business problem and let's build something together to put this data to good use. Let's do it now!

by Brian Rubow,
Product Manager

I have been a Scoutmaster for the Boy Scouts of America for about 5 years now. Our troop goes camping several times a year. Utah offers a lot of beautiful and interesting camping areas. The variety is remarkable. In our troop we spent a lot of time teaching and preparing the boys to not only have fun, but also be safe and wise in their fun. Some planning ahead, training and common sense can make a huge difference. Nearly every week, I have our Senior Patrol Leader help all of the scouts in our troop recite a number of memorized phrases including the Scout Oath, Law, Slogan, Motto and sometimes even the Outdoor Code. The Scout Motto is the famous one known to almost everyone in the world; "Be Prepared". Reciting it every week helps our minds to remember to focus on being prepared for whatever may come. We prepare the boys to handle emergency situations such as medical and weather related emergencies. "Be Prepared" applies not only to scouting activities like camping, canoeing and hiking, but also to school, our careers and everything we do.

At Cimetrix we also like to "Be Prepared". In particular, at the time we designed our EDA (Interface A) products, CIMPortal and EDAConnect we recognized a need to support multiple versions of the standard. Since 2006, there has been only one allowed version of the EDA standards. This is the ISMI Freeze Version which specifies the 1105 version of the SEMI® standards. At Cimetrix we knew that at some point in the future the 1105 ISMI Freeze Version would not be the only version implemented. As co-chair of the DDA Task Force responsible for the development of the SEMI EDA standards, I can personally attest that the standards have continued to change, mature and improve. At Cimetrix, we predicted from the start that at some point in the future, factories would want these new features in the standards and that ISMI would announce another EDA Freeze Version.

Due to the nature of the underlying SOAP/XML technology, the client and equipment are required to use the same version of the SEMI standards. With one and only one ISMI Freeze Version, this is easy. Everyone's implementation works with everyone else's implementation. With more than one ISMI Freeze Version, it is more complicated. Each equipment supplier has to support each ISMI Freeze Version to communicate with the different client software at different factories or even in the same factory. Each factory has to support each ISMI Freeze Version to communicate with the different equipment implementing different versions.

ISMI is poised to announce another EDA Freeze Version soon. Certainly the factories using the EDA standards will expect equipment suppliers to adopt the new version as soon as possible. And certainly factory data collection applications will want to adopt the new version and take advantage of the new features.

To "Be Prepared" for the future, Cimetrix originally designed both EDA products, CIMPortal and EDAConnect, for the future. Each product is designed with an abstraction layer to be able to support multiple EDA versions at the same time. This makes it possible for Cimetrix to adopt the new EDA versions without rearchitecting the products. In turn, this passes on tremendous value to our customers who also will not have to rearchitect their solutions. In fact, Cimetrix customer should be able to upgrade to new Freeze Versions with relative ease. It is nice to "Be Prepared".

Schedule a meeting at SEMICON® West 2010 to discuss your Interface A needs further!
Or visit us at Booth #2331, South Hall. 

by Brent Forsgren,
Director of OEM Solutions

Fabs are like people, each one has it own personality traits. Fortunately, and arguably unfortunately, unlike people, most fabs have a handbook for their “personalities” in the form of specifications. I have found it interesting, that like people, fab “personalities” have common and unique features. Here are a few of examples:

• There are some fabs that I would classify as the “Clean Freak.” Compliance to GEM and GEM 300 standards is important but more important to them is preventing cross contamination between FOUPs, and from wafer to wafer – “Who left this loadport door open? Don’t you know you can spread particles by doing that??”
• Then there are other fabs that I would classify as the “Punctilious.” Again, compliance to the GEM and GEM300 standards is required but more important to them is knowing exactly when you are going to be done, when you are ready for more, are you done yet, how much longer are you going to be, are you done yet?
• Then there are other fabs that are “Methodical-ious” (if I can make that a word). Everything must happen in a very specific order. 1) Don’t allow jobs to exist without material at the tool first; 2) Download the recipe before every job that is created; 3) Create the job now. 4) If the FOUP is removed before the job starts, refer to rule 1.
• And let’s admit it, all fabs are “Control Freaks,” if they weren’t we wouldn’t be in business. They control when jobs are run, how jobs are run, and what a job does.

Hmmmm……that makes me wonder, if fabs are like people, does that make companies like Cimetrix psychiatrists?

by Bob Reback,
President and CEO

I always enjoy meeting with customers. I may be a little “old school,” but the personal touch of sitting across the table from someone, having a cup of coffee and learning firsthand what they think of our products, our people and our services is always educational, and even more so when the news is not good, as that gives us the opportunity to learn and improve going forward. Of course, the non-verbal communication is often times more important than the words, and you just can’t get that over the phone.

Due to the downturn in economic conditions during late 2008 and early 2009, we limited all company paid travel. As president, I also set the example to use the telephone and web conferences for most customer interactions. As business conditions began to improve in late summer of 2009, we began to relax our travel constraints. This led me to take a business trip to Europe to meet with some of our semiconductor customers as well as a few of our new PV customers.

Being on the road visiting customers usually involves a very full schedule, and Cimetrix business trips are even more so. This business trip started off meeting with customers in The Netherlands and then we drove across Germany meeting with customers in a number of cities as we made our way to our final destination in the Munich area. As we drove across Germany and stopped in a number of cities and small towns, I was surprised to see quite a few modern, high tech windmills, but I was shocked at the solar panels. We saw solar panels on the roofs of commercial buildings, residential building, farms and just about any type of structure with a roof. We saw solar panels in cities, towns and the countryside as we drove by on the Autobahn.

The German government has been the world leader in promoting renewable energy. The German government implemented a program of “feed in” tariffs that provide subsidies for entities (people, businesses, etc.) to install solar panels. As it was explained to me, it is typical in Germany to purchase electricity at a rate of say $0.08 to $0.10 per kilowatt hour. The government feed-in tariff means that if someone installs solar panels on their roof, the German government will guarantee that it will purchase all of the electricity from your solar panels for the next 20 years at the price of $0.45 per kilowatt hour. (Note that the feed-in tariffs decline every year). Since you have a guaranteed contract to sell this electricity to the government, people are able to go to a bank and borrow the funds to cover the upfront costs of installing the solar panels. Then the profit obtained on a monthly basis is sufficient to pay back the loan and interest charges. After about 10 years, the loan is paid off and then the person with the solar panels can enjoy the operating profits for the remaining years on the original 20 year contract. It was fascinating to see firsthand the results of this program, as well as have discussions with many of the German people. Not only did we discuss with many of the engineers that are our customers, but we had discussions with the average citizens in various restaurants and hotels. Everyone knew the term “PV” and there was certainly an air of excitement about leading the world in renewable energy.

You might ask, “How does this affect Cimetrix?” Well the theory is that government feed-in tariffs will stimulate demand, which in turn will stimulate production of more solar panels, which will then lead to improved efficiencies in both the technology used in solar panels as well as the economies of scale, which will ultimately lead to better price/performance solar panels that are cost effective on their own merits without government subsidies. Since solar panels are based on silicon or thin film substrates and have a similar manufacturing process to computer chips, there is a need to continually improve the manufacturing process to make better solar cells and lower the manufacturing costs. That is where factory connectivity and advanced software systems similar to those used in semiconductor manufacturing come into play. Many of the German PV manufacturers have adopted the “PV2” software for connecting manufacturing equipment with factory software. Cimetrix has enhanced its product offerings to meet these needs and hopes the industry is successful in promoting widespread usage of these PV software standards. If this happens, this should significantly increase the available market for Cimetrix products and services.

by Doug Rust,
Director, Product Engineering & Customer Support

The time shift for daylight savings this week is going to cause me some grief for some time. Most countries in Europe will not adjust until March 28. Many countries in Asia (India, Singapore, Taiwan, Malaysia and Japan for example) are not adjusting for daylight savings at all in 2010. Since our customers are all over the world, I’m going to have a tough time keeping in sync. It’s inevitable that I’ll miss some important event this month. So, I thought it would be very àpropos to submit a blog about Time Synchronization.

SEMI® standard E148 defines software standards for the equipment communication interface to enable the equipment control computers to automatically synchronize their clocks from a standard time base. Although this standard was just published a couple years ago, it is not new technology. Computer systems have been using internet technology to synchronize their clocks with a common time base for over 20 years now. The Network Time Protocol (NTP – a.k.a RFC1305) is the internet standard for time synchronization that is designed to enable any computer to synchronize with a reference clock (most commonly the atomic clock in Colorado) through various time servers available on the internet. SEMI E148 specifies the NTP standard as the mechanism for synchronizing the equipment control computer with the factory computer systems (as well as some other requirements).

This is becoming a critical capability as factories begin to adopt other information technology that enables them to collect thousands of precise data points from each run on each tool. Making effective use of this data requires that the time-base for data source ‘A’ is the same as the time base for other data sources so that the raw data can be assimilated and correlated to produce valuable manufacturing information. If there was some important “event” in manufacturing that we need to analyze the first thing we will do is to try to determine what else was happening at the time of that event. So the first question we ask is “when did that occur?” That’s where we can run into serious problems if there is no common time base.

Most modern operating systems have the NTP client software built-in. It’s possible to synchronize with reliable time servers on the internet and there are many affordable commercial time servers available. Even if users do not implement all of the E148 requirements, I suspect we are going to see more and more factory networks using NTP to synchronize the manufacturing equipment with factory hosts over the next year (if they haven’t already done it). For me, I guess I’m going to be out of sync at least until May 28.