Industry News, Trends and Technology, and Standards Updates

As predicted, Cimetrix had a very busy and fruitful week (September 11-15) in Taiwan. In addition to hosting numerous customers, prospects, and friends at our booth, Cimetrix made multiple technical presentations focused on Smart Manufacturing, both at the show and at the eMDC Conference in Hsinchu. Two of these were jointly presented with Mark Reath of GLOBALFOUNDRIES. Use the links at the bottom of this post if you’d like a copy of this material.

In addition to our participation in these technical events, Cimetrix demonstrated the new Cimetrix EDATester™ product to a number of factory customers who now need a validated method for verifying incoming equipment compliance to the SEMI Equipment Data Acquisition (EDA) suite of standards. The timing for this product is ideal, based on the increased rate of adoption for these standards we have seen in Taiwan. 

Given the industry’s current momentum and near-term outlook, the mood in Taiwan is overwhelmingly positive, and the trade show almost had a celebratory quality to it. Fittingly, the Leadership Gala Dinner held Wednesday night was a feast for all the senses, from the food to the entertainment to the array of dignitaries who attended. 

For the second year in a row, President Tsai attended and expressed her gratitude for the industry’s role in advancing the quality of life across the nation and her administration’s unwavering support for its continued prosperity. Dr. Nicky Lu, one of Taiwan’s well-known business and technology icons, was honored with the industry’s most prestigious Leadership Award, and shared his personal perspective on some of the exciting semiconductor-enabled products now in the works. 

Dr. Lu went into even more depth about semiconductor technology evolution in his keynote address for the eMDC Conference (Joint Symposium of e-Manufacturing & Design Collaboration Symposium 2017 and ISSM 2017) on Friday, outlining a powerful vision that he’s labelled as “HIDAS: Heterogeneous Integrated Design/Architecture/System for Silicon-Centric Nano-System in Si4.0” – if you want to know more, you’ll want to contact him directly!

All in all, is was a great week to be in Taiwan, especially since Typhoon Talim decided to take a turn to the north without dampening the spirit of SEMICON. Please contact us with any questions, and we look forward to seeing you at future industry events.

Device Scaling vs. Process Control Scaling: Advanced Sensorization Closes the Gap

Smarter Manufacturing through Equipment Data-Driven Application Design

Smart Manufacturing Requirements for Equipment Capability and Control

The week of September 11 will be a big one for Cimetrix in Taiwan. In addition to exhibiting at SEMICON Taiwan for the third year in a row (Booth # 2926) with our local partner, Flagship International, Cimetrix is privileged to be making joint technical presentations with GLOBALFOUNDRIES in two distinct events.

On Friday of that week, this same duo will present “Device Scaling vs. Process Control Scaling: Advanced Sensorization Closes the Gap” at the Ambassador Hotel in Hsinchu on September 15, at 08:30–16:40 (click on the “Program” link). This presentation discusses how GLOBALFOUNDRIES is addressing the need for precise fault detection and process control in the sub-10nm domain  through integration of high-speed, process-specific sensors using its EDA (Equipment Data Acquisition standard) infrastructure to deal seamlessly with complex data types (e.g., spectral data) and the context information necessary to use this information effectively.  The conference agenda features speakers and topics across a broad spectrum of the industry’s value chain, so the conference promises to be an exciting and well-attended event.

In addition to these technical events, Cimetrix will be demonstrating its new EDATester™ product at the booth along with its complete family of connectivity and equipment control products.

We invite our customers and colleagues to join us at all of these venues and hope to see you in Taiwan soon.

SEMICON West 2017 has come and gone! The trade show and technical conference was held this year at the Moscone Center in San Francisco and turned out to be a very busy show for the Cimetrix team. While the show was only two halls strong, we had many meetings with current clients, met with new potential clients and even made a few new friends along the way.

A major highlight of the event for all of Cimetrix took place Tuesday evening at the SEMI Standards Awards reception where our own Brian Rubow, Director of Client Training and Support at Cimetrix, took home the prestigious SEMI Leadership Award. Brian, who has over 20 years of experience in the industry, has been a long-time leader and key contributor to the SEMI Standards programs throughout his career.  We were very proud of his work and so glad he was able to receive recognition from the SEMI organization. 

The sales team was hard at work during the entire show and it wasn’t often the Cimetrix booth was empty! Meeting with many new companies made the show very exciting. Our team was especially pleased to meet for several hours with the CEO of our newest client from China! The relationships we establish and cultivate while at these tradeshows make them an invaluable part of our sales, marketing and support efforts. 

The Cimetrix team members that attended were Bob Reback (President and CEO), Dave Faulkner (EVP Sales and Marketing), Ranjan Chatterjee (V.P. Emerging Business & Technology Office), Stu Benger (Director of Sales, North America), Brian Rubow (Director of Client Training and Support), David Francis (Director of Product Management), Alan Weber (V.P. New Product Innovations) and Kimberly Daich (Marketing Manager). Several team members were able to attend for just a day including some of our newest engineers. It was a great chance for them to get to know the show, meet some clients and see some of the machines our software powers in action.

The Moscone Center is undergoing major renovations in preparation for SEMICON West 2018; and we were able to secure a premium spot for next year’s show. SEMICON West is always a great show and we were pleased to be able to attend this year, and as always we’re already looking forward to SEMICON West 2018!

Cimetrix participated in the recent European Advanced Process Control and Manufacturing (apc|m) Conference, along with over 150 control professionals across the European and global semiconductor manufacturing industry. The conference was held in Dublin, a lively city on the east coast of Ireland which features a charming juxtaposition of old and new and is home to 1.2 million of the friendliest and most talkative people on the planet! 

Of course, one of Ireland’s greatest “natural resources” may also contribute to their fine spirits…

This conference, now in its 17^th year and organized by Silicon Saxony, is one of only a few global events dedicated to the domain of semiconductor process control and directly supporting technologies. This year’s attendance was up from that of the three previous years, a clear indication that this area continues to hold keen interest for the European high-tech manufacturing community. Moreover, the participants represented all links in the semiconductor manufacturing value chain, from universities and research institutes to component, subsystem, and equipment suppliers to software product and services providers to semiconductor IDMs and foundries across a wide spectrum of device types to industry trade organizations – something for everyone.

The local sponsor for the conference was Intel, which is the largest private-sector investor in the Irish economy and one of its biggest employers. In addition to excellent logistics support, Intel hosted a lovely evening of fine food and local entertainment at the world-renowned Trinity College.

As in many prior years, Cimetrix was privileged to present at this conference. Alan Weber delivered a talk entitled “Smarter Manufacturing with SEMI Standards: Practical Approaches for Plug-and-Play Application Integration.” This topic was well aligned with one of the key themes of this year’s event, but stressed the point that our industry already has at its disposal many of the tools, techniques, and enabling standards required for Smart Manufacturing. Specifically, the presentation illustrated how the new SEMI E172 SECS Equipment Data Dictionary (SEDD) standard could be used to document an equipment’s GEM interface in way that provided much of the same hierarchical structure and context information inherent in the latest generation of EDA metadata models (SEMI E120, E125, and E164). If you want to know more, feel free to download a copy of the entire presentation from our web site.

In addition to Smart Manufacturing, recurring themes of the presentations included:

• The IoT (Internet of Things) and interesting applications for all these “things” (e.g., most new drugs depend on a “smart delivery device” to be used safely and effectively)
• Decision-driven data collection strategies (vs. “just in case” approaches)
• Automated analysis, automated decision making, artificial intelligence, and other forms of machine learning
• The evolution from reactive systems to predictive systems, or in Gartner’s terms, using data to move from hindsight to insight to foresight 
• The increasing use eOCAP techniques (electronic aids and workflow engine support for Out-of-Control Action Plan execution) 
• And, last but certainly not least, connectivity standards and technologies as key enablers of much of the above

The agenda also featured keynotes and invited talks from a variety of sources, namely:

• Bosch – Success Factors for Semiconductor Manufacturing in High-Cost Locations
• Intel – IoT’s Connected Devices and Big Data Analytics: the Opportunities and Challenges in Semiconductor Manufacturing
• ST Microelectronics – FDC Control: the Loop Between Standardization and Innovation
• IBM Research – Automating Analytics for Cognitive IoT 
• Rudolph Technologies – Smart Manufacturing
• Applied Materials – Advancements in FDC: Reducing False Alarms and Optimizing Model and Limits Management

The insights gained from these and the other 30+ presentations are too numerous to list here, but in aggregate, they provided an excellent reminder of how relevant semiconductor technology has become for our comfort, sustenance, safety, and overall quality of life. 

This conference and its sister conference in the US are excellent venues to understand what manufacturers do with all the data they collect, so if this topic piques your interest, be sure to put these events on your calendar in the future. In the meantime, if you have questions about any of the above, or want to know how equipment connectivity and control fit into the overall Smart Manufacturing landscape, please contact us!

SEMICON China was held from March 14-16 in Shanghai at the Shanghai New International Expo Centre.

This is a monstrously large complex of 17 exhibit halls of which 5 were filled with semiconductor and flat panel exhibitors. Another set of shows for PCB and solar filled up the remaining halls. China is clearly becoming the center for electronics manufacturing.

Cimetrix enjoyed sharing a booth with our partner Flagship International for the second year in a row.

The Cimetrix employees that attended were: Bob Reback (President and CEO), Dave Faulkner (EVP Sales and Marketing), Ranjan Chatterjee (V.P., Emerging Business & Technology Office), and Kimberly Daich (Marketing Manager).

Our first China based equipment supplier using CIMControlFramework is finishing up their first production tools making full use of the CCF benefits.

Meetings with this customer’s president confirmed excellent progress in setting up this equipment supplier for future growth with a solid software platform.

This relationship we are establishing will provide confidence to other semiconductor equipment suppliers keeping a close eye on our progress. Cimetrix had a chance to visit with all equipment suppliers during the show identifying several new projects as we start our penetration in China. Cimetrix also stopped by Electronica, a trade-show that is co-located with SEMICON China in Shanghai.

Cimetrix plans to open an office in Shanghai during 2017 and equipment suppliers at the show expressed strong support for this move. More information about the Cimetrix plans in China will be coming soon.  

The 14th innovations forum for automation was held on January 19 and 20, 2017 at the DGUV Akademie in Dresden, Germany.

Cimetrix was one of the sponsors of the conference.  Dresden is hot bed for semiconductor manufacturing in Europe.  In fact, 50% of the chip output from Europe comes from Dresden. The conference is organized by the Automation Network Dresden which consists of 5 Dresden based companies; AIS, HAP, Ortner, SYSTEMA and Xenon.  SYSTEMA is a Cimetrix partner and helps us with integration projects. 

The focus of the conference is to bring the latest information on best practices, new technologies and the future of automation.  Themes this year were Smart Manufacturing, Industry 4.0 and IIOT (Industrial Internet of Things).  Presentations by Bosch about their automation roadmap, Infineon about running experiments in a highly automated fab, Kostal about standardizing MES, and IAV about the challenges of automated driving where a few of the interesting case studies and technologies.  This is a great conference to meet semiconductor professionals from Europe and learn what the European community is doing in the area of fab automation. For Cimetrix, it is good to see that equipment to host connectivity plays a key role in all the projects outlined during the conference. Sponsoring and attending gave us the opportunity to meet with current customers and start discussions with new potential customers. 

Before the conference, SYSTEMA held an Expert Day session at the SYSTEMA facility in Dresden on the morning of January 19.  The session was a series of presentations targeting predictive maintenance.  SYSTEMA and its partners have a wealth of experience in this area.  

 SEMI North America Information & Control Task Force and Committee fall meetings were last held at SEMI headquarters November 7 through 9, 2016. During these meetings, SEMI announced that they are relocating their headquarters to Milpitas, CA. That move is currently underway. In the GEM 300 task force, all of the ballots failed to pass. This include ballot 5872A, 5549, 6026, 6066, and 6068. In the DDA task force, ballot 6064 also failed.

Ballot 5872A is work driven by Cimetrix to complete to work initially proposed for the E172 standard SEDD files, a feature to enable an electronic format for GEM documentation. Ballot 5872A failed due to some minor issues. SEDD files already provide partial GEM interface documentation in an XML file by listing the data variables, status variables, equipment constants, collection events and alarms. The ballot proposes to enhance SEDD files by adding a list of supported SECS-II messages, remote commands, SEMI standards (with compliance tables), and default event reports. The ballot will be reworked and resubmitted as ballot 5872B.

 Ballot 5549A is a title change and organizational change to the GEM E30 standard. Several years ago, SEMI required all standards to have an official designation, such as Guide or Specification. E30 currently has a title that fails to establish an official standard designation. Additionally, the standard currently fails to have the mandatory sections “Purpose”, “Scope”, “Limitations” like other standards. The ballot was delayed several years due to the SML copyright claim by Peer Group and the ensuing legal confrontation with SEMI. The ballot was finally submitted in 2016 and failed because it renamed the Application Notes as an Appendix instead of “Related Information”. Additionally, there was some confusion because the ballot was based on the 0611 version of E30 rather than the 0416 version which had just been published. This ballot will be reworked and resubmitted as ballot 5549B.

 Ballots 6026, 6066, 6068 and 6024 are reapproval ballots for standards E109, E130/E130.1, E116/E116.1 and E121. SEMI automatically submits all standards for re-approval every five years if a standard has not been revised. These standards all failed due to outdated references. They will all be resubmitted in 2017 with minor changes to correct the outdated references.

 The new GUI task force was approved to create a new major revision of the E95 standard. In particular, the new revision will accommodate new software and hardware technology when laying out equipment user interfaces.

 Cimetrix proposed a new activity to define new SECS-II messages for transferring recipes. The activity will result in a new ballot 6614. Currently, the GEM standard defines two ways to transfer unformatted recipes. Using simple Stream 7 messages S7F3 and S7F6, the entire recipe is part of a single message. This makes is really easy to implement in the host and equipment GEM software, but recipes are limited to about 16.7 MB (the maximum size of a single data item in any SECS-II message). The second way is using the large recipe scenarios which involve using a sequence of messages S7F43/F44, S13F1/S13F2, S13F3/F4, S13F5/F6 (repeated iteratively until there is an error), S6F11/F12 and finally S13F7/F8. Even for an expert, this is very complicated. Ballot 6614 will propose simple new messages for transferring a large recipe using a single message where the recipe can be broken up into multiple parts where each part is up to 16.7 MB in size. If approved, another ballot will attempt to add this to GEM standard. This will open the door for the GEM standard to be used more effectively and in more application where the 16.7 MB limitation posed an issue.

 Japan Information & Control committee (I&CC) announced the official withdrawal of OBEM standards E98 and E98.1. Japan also announced a GEM300A initiative which includes standards E170 and E171 and E174. E170 is the Production Recipe Standard which allows equipment to designate production and non-production recipes; where production recipes are given change protection. E171 defines predictive carrier logistics. Ballot 5601 defines Wafer Job Management. It is not clear whether or not there any IC makers will demand any of these newer standards. Of the three, E170 seems to be most useful and interesting. Predictive carrier logistics seems to be useful only for equipment that have carrier internal buffers. It attempts to help the equipment report when carriers will be ready for removal. It is not clear how E171 will compete with the upcoming E87 ballot 4946 to be submitted by the Korean Information & Control Committee in 2017. Ballot 4946 modified the E87 standard to predict when carriers will be ready to unload. Wafer Job Management is a controversial standard. Japan I&CC announced the passing of ballot 5601 (now E174) despite the strong opposition by multiple knowledgeable voters in other regions, and despite very underwhelming support from regional leaders in North America, Korea, Europe and Taiwan.

 Korean Information & Control committee announced plans to submit ballot 5832, a proposal for a new Generic Counter standard which is built upon the GEM standard. The standard would allow an equipment to define various types of generic “counters” that can be reset by the host. The counters could be used a wide variety of applications; particularly predictive maintenance. The standard as defined in the current ballot defines digital counters, analog counters and collection event counters. Voting period for this ballot just ended recently.

 Next North American I&CC meetings will be held first week in April, 2017.

SEMICON Europa was held in Grenoble France this year from October 25-27, 2016.  Grenoble is a hot point for semiconductor technology in France with fabs and technology centers located close by.  Typically, this trade fair moves between Dresden and Grenoble each year with attendance of about 6000. 

The Cimetrix team consisted of Dave Faulkner, EVP Sales & Marketing; Bruce Febvret, Business Development,  Europe; and Kimberly Daich, our new Marketing Manager.  Cimetrix brought our new double wide booth with new branding and was located next to our integration partner Agileo Automation.  

We highlighted our CIMPortal Plus software demonstrating the benefits of the SEMI E164 standard.  Attendance seemed light this year which allowed the Cimetrix team ample time to meet with various equipment supplier customers who had exhibits at the show. Of particular interest to our customers was our advice on when and how to add Interface A to their control systems, and what impact Industry 4.0 and smart manufacturing will bring.  The evening networking event was very well done; congrats to the SEMI team.

SEMI made an importance announcement that starting next year, SEMICON Europa will no longer move back and forth between Grenoble and Dresden; and will move to Munich in mid-November.  This allows one large show featuring SEMICON and Productronica.  SEMICON Europa will focus on semiconductor related activities and Productronica will focus on electronics assembly technologies.  This decision works very well for Cimetrix as we share customers in both industries. See you next year in Munich!

Exhibiting at SEMICON Taiwan for the second time in as many years, Cimetrix significantly expanded its presence at the show with a booth in the Smart Manufacturing Pavilion. Like last year, we shared an exhibit with one of our Taiwan partner companies, Flagship International.

Since the semiconductor industry is one of the most important economic engines in Taiwan, this year’s Gala Dinner at the Grand Hyatt featured an excellent and supportive speech by the country’s new President, Dr. Ing-Wen Tsai. Taiwan’s tech industries have had a solid year thus far, leading other regions of the world and capturing additional market share.

In recent years, SEMI has increased its emphasis on focused “educational” forums at its SEMICON shows, and set a new high-water mark at SEMICON Taiwan with 20 of these events ranging from Design to Materials to Packaging to Overseas Investmen. Cimetrix was privileged to be named as one of the speakers at the Smart Manufacturing Forum, which included presentations by a variety of thought leaders from UMC, Rockwell Automation, ASE, and others. Alan Weber represented Cimetrix with a presentation entitled “Realizing Smart Manufacturing in Semiconductor Industry with SEMI Standards,” making the case that the industry’s factories already embody many of the characteristics of a Smart Manufacturing environment by virtue of the latest generations of SEMI Standards that support the required connectivity and control capabilities.

As a specific example, the UMC “Big Data to Manufacturing Excellence” presentation by Mr. James Lin described the “Wait Time Waste” analysis application, which is directly enabled by the SEMI E168 (Product Time Measurement) standard and the underlying detailed equipment event data called for in the E164 (EDA Common Metadata) standard.

To support the level of ongoing activity at the show and elsewhere in Taiwan, the Cimetrix contingent also included Derek Lindsey and Kerry Iwamoto, shown here during one of quieter moments in the booth.

Another highlight of the week for Cimetrix was participation in the eMDC (e-Manufacturing & Design Collaboration Symposium), now in its 10th year in Taiwan. Alan Weber made a presentation entitled “The Role of Models in Semiconductor Smart Manufacturing” that echoed a number of the messages shared at the Smart Manufacturing Forum but with heavier emphasis on the manufacturing applications that are enabled.

The basic idea is that most of the information required to support generic process monitoring and calculation of productivity KPIs is now mandated by the latest generation of equipment model standards, and this promises to drastically reduce the factory cost of developing and integrating these applications.
 
On a final note, in discussing the use of the SEMI EDA standards for critical production applications with a number of the leading chip makers during the week, it seems that we are now very close to an industry tipping point for the adoption of this technology. This has been a long time in coming, and opens up a realm of exciting new possibilities for consumers of detailed equipment and process data!

Wikipedia graphic putting Industrie 4.0 in historical context (Figure 1)

If the attendance at the most recent SEMICON West and SEMICON Taiwan trade shows are any indication, the terms “Smart Manufacturing”, “Industry 4.0” and “IIoT” (Industrial Internet of Things) have indeed gained recognition and momentum as the rallying cry for the 4^th industrial revolution (see figure 1).

In order to reach an even broader audience, the folks at Extension Media will host a free Webinar next week (September 27, 2016, at 1:00 p.m. EDT) with the provocative title “Is the Semiconductor Industry Ready for Industry 4.0 and the IIoT?”

Cimetrix’ VP of New Product Innovations, Alan Weber, is one of the presenters, and will make the case that the industry IS in fact ready for Industry 4.0 and the IIoT by virtue of the latest generations of SEMI Standards that support the kind of connectivity and control required by components of a Smart Manufacturing environment. He will not only show how the evolution of these standards has kept pace with the industry’s automation requirements for almost three decades, but also describe a number of concrete factory application examples that directly leverage the model-based aspects of the latest standards to achieve “plug-and-play” status across multiple process areas.

Sharing the agenda for the Webinar is Tom Sonderman, the VP and General Manager of Rudolph Technologies’ Software Business Unit. Tom has over 20 years of direct experience in the world-class Advanced Precision Manufacturing organizations of AMD and GLOBALFOUNDRIES before joining Rudolph, so there are few people in the world more qualified than he to talk about our industry’s automation capabilities.