Industry News, Trends and Technology, and Standards Updates

8 things to consider when implementing a GEM Interface

Posted by Cimetrix on Feb 9, 2010 7:57:00 AM

by Matt Mayer,
Principal Software Engineer, Global Services

GEM interface checklist

    1. Establishing Communication- A standardized communications mechanism ensures both equipment and host have agreed, and all requirements necessary for properly collaborating data (between tool and host) based on the SEMI® SECS messaging standards (E5) are compatible during the connected status and after connection could have been disrupted.
    2. Spooling- Spooling is an essential part of keeping synchronization with the tool. Communications (connect status) can be disrupted. In the event of communication disruption, the tool can be configured to spool collection event (S6F11) messages after communications has been restored and the host requests the last know transactions for the lost time span.

      Spooling can be configured to retain a SECS message pooled history of almost any stream and function (SEMI E5 standard). With this enriched functional capability, any condition of the tool can be relayed at anytime after communication has been re-established (e.g.: alarms, events, processing state changes, etc…).

      With that said about spooling, the host is required to take special care of the data received and re-act to the latest available data (spooled messages) in the most appropriate manner. In many cases, this behavior of the host takes special care at documentation and tool manufacturer collaboration.

    3. Alarm Handling- The alarm handling capability provides for host with notifications and management of alarm conditions occurring on the equipment. Typically an alarm is associated with abnormal conditions of the equipment.

      With each alarm a correlating set/clear event notification will be issued to the host. As with each event definition, a report can be defined and linked in order to associate variable data specific to the alarm (see Event Handling).

    4. Event Handling- Event handling provides a dynamic and flexible method for the tool manufacturer to customize the equipment to meet needs specified by the fabrication facilities with respect to data representation and presentation to the host. The event based approach to data collection provides automatic notification to the host and its activities which are useful in monitoring the equipment and in maintaining synchronization with the equipment.

      Reports can be configured by the host application and attached to event report messages (S6F11). These reports are linked to the desired event and are typically associated with variable data relating to the event generated by the equipment.

    5. Variable Handling- The variable handling capability provide both the tool and equipment the ability to share details. Variables are categorized in three groups.

      Groups:

      • Equipment Constants, provides the capability for the host to read and change the value of selected variables of type EC which allow the host to reconfigure the variety of equipment functionality.
      • Status data, the values of a status variable will be current.
      • Discrete data, the values of DVs are only guaranteed to be valid at the occurrence of a collection event.
    6. Process State Model Handling- The processing state model is dependent on the equipment process and technology. However, there are expected common aspects to these models. Many of these equipments use the GEM proposed state model with some variations. An ERROR and MANUAL state can be utilized during initialization and when the state is idle.

      Based on the SEMI E30 standard, the equipment must generate collection events for each processing state transition, as well as provide status variables (ProcessState, PreviousProcessState) which values represent the current processing state and the previous processing state. Other collection event reports can be defined and linked to event triggers.

    7. Remote Command Handling- The capability which provides the host with control over the equipment and its operations. A remote command consists of parameter name/value pair with a particular host command (S2F41). The equipment manufacturer will provide unique names for any supported command parameters. The command parameters are defined by fabrication facilities and equipment manufacturers.

      A typical set of remote commands are listed below. However, the list is not a constraint and any set of remote commands can be specified and used.

      • PPSELECT
      • START
      • STOP
      • PAUSE
      • ABORT
    8. Recipe Upload/Download Handling- Recipe handling provides the means for transferring process (recipe) information between the host and the equipment. The specifications for equipment processing (e.g. recipes) are managed through SECS messages (E5). Recipe uploading and downloading will be accomplished using several formats and combination thereof.

      Formats:

      • Unformatted recipe content
      • Formatted recipe content
      • Value based content transfer
      • File based content transfer

In addition to the above mentioned considerations, Cimetrix's CIMConnect, an object-oriented software development kit for equipment suppliers to quickly develop a GEM interface, also allows for multi-host connections.

Topics: Industry Highlights, SECS/GEM, Cimetrix Products

WCF and CIMControlFramework

Posted by Cimetrix on Feb 1, 2010 7:08:00 AM

by Derek Lindsey,
Principal Software Engineer

When creating new tools for use in the semiconductor industry, most original equipment manufacturers (OEMs) prefer to concentrate on their area of expertise – the processing of wafers. The bother for them is that they have to conform to material handling standards to get the wafers delivered to the correct process module before they can perform process on the wafers. They also have other overhead that takes time and resources away from what they do best. This overhead includes operator interfaces, recipe management, error handling and the list goes on.

With CIMControlFramework™ we set out to create a flexible equipment automation framework that handles much of the overhead associated with wafer processing. This allows OEMs to spend more time on perfecting their processing while still creating a first class application to drive the tool. The framework includes packages for performing recipe management, alarm management, user management, configuration management, message logging, scheduling, factory automation, user interface and material handling.

Data generated at any point on the tool from any of these packages can be quickly and easily accessed by any other module or external application. This is where Windows Communication Foundation (WCF) enters the picture. To paraphrase Reggie Jackson, WCF is the straw that stirs the drink. It allows access to all of the functionality provided in these packages. Cimetrix chose to use WCF for distributing the functionality contained in each of these packages. WCF is as easy as ABC. In order to use WCF services, we need three pieces of information: an Address, a Binding and a Contract (A, B, C).

Each of the packages listed above provides a service with functionality for clients to access. The functionality provided by the service is the contract. An address is where the service is located. A binding is how the client talks to the service (what protocol is used.) These three pieces of information are called an Endpoint. Once a client application knows the endpoint, it can access the vast array of functionality provided by the CIMControlFramework service packages.

Once an OEM taps into CIMControlFramework, they can focus their resources on process technology and product differentiation.

Topics: Equipment Control-Software Products, Programming Tools, Cimetrix Products

Logging - enabling passionate support

Posted by Cimetrix on Jan 19, 2010 9:06:00 AM

by David Warren,
Senior Software Engineer, CCF Solution Architect

Logging ScreenshotIn today’s world, having great software is not enough. To be successful, software must also be supportable. Keeping a record of what the software is doing and has done enables after-the-fact diagnosis and makes remote support much more efficient. As an additional benefit, this information can also be displayed live to the GUI, giving the operator additional insight into what is happening. Having a record makes it possible to determine if the software is working correctly or incorrectly. In Cimetrix’s new tool control software, CIMControlFramework™, this functionality is provided by the Logging package.

The CIMControlFramework Logging package provides an MxN information delivery system—the logging package receives information from multiple sources and delivers it to multiple destinations. These sources may be different software components or instances within the same process. They may even be in other processes on the same or different computers. Likewise, the destinations may also be distributed. Some destinations may store the information for a few seconds or minutes, like printing to a console or displaying on a GUI. Other destinations may store information for many days or indefinitely in a database or file.

Logging is a two-edged sword however. There is a balance between information and performance. Storing too much information can adversely affect performance. Storing too little information boosts performance, but limits the benefits of logging. Too often the mindset is to turn logging off most of the time, and only turn it on when trying to solve a problem. I think it is more effective to turn on as much logging as possible—and then leave it on all the time. It may be necessary to limit the information flow to CPU intensive destinations to maintain acceptable performance, but it is worth it. By leaving logging on all the time, it is possible to find those problems whose descriptions start with “This only happened once, but…”

Logging enables passionate support. Just as surveillance cameras can provide more information than an eyewitness, a log record can provide more information than a customer incident report. The additional information is usually crucial in finding root causes and resolving customer issues quickly. And that’s something we are all interested in.

Topics: Equipment Control-Software Products, Cimetrix Products

New Year, New Operating System

Posted by Cimetrix on Jan 6, 2010 10:25:00 AM

by Brent Forsgren,
EFA Practice Manager

It is the start of a new year, thank goodness! I wonder what is in store for my Global Services team this year. Last year was a tough year for the semiconductor market, but early indications and market experts are saying that 2010 should be much better than 2009.

On top of the market’s expected upward turn, Microsoft released Windows 7 in late 2009 to replace their not so popular Windows Vista. I expect that a significant portion of our customer’s equipment sales this year will be of existing technology and software. But for our customers that will be developing and selling new tools and software, will you jump to Windows 7 or will you wait for it to prove itself in the market place? Additionally, if you switch to Windows 7 will you also make the jump to a 64-bit architecture or will you stay with the aging 32-bit architecture?

We welcome your comments and feedback! I would love to hear your thoughts and plans.  Please comment below or email me at brent.forsgren@cimetrix.com.

Topics: Customer Support, Doing Business with Cimetrix, Global Services, Cimetrix Products

Cimetrix Refocuses in Japan

Posted by Cimetrix on Dec 17, 2009 7:59:00 AM

by Dave Faulkner,
EVP, Sales & Marketing

At SEMICON Japan 2009, Cimetrix announced a transition in its distribution strategy in Japan. Rorze Corporation has been appointed as the exclusive distributor in Japan for Cimetrix Factory Automation and Tool Control products. Rorze provides innovative robotic and wafer handling solutions to the global semiconductor industry. SEMICON Japan Cimetrix RorzeCimetrix and Rorze have been working together for several years with Rorze transitioning the FA for its Sorter line to Cimetrix CIMConnect and CIM300 products, and working closely with Cimetrix to integrate its EFEM and vacuum platforms with the Cimetrix CIMControlFramework tool control software. This technology exchange led to an investment by Rorze in Cimetrix and the appointment of Rorze as the Cimetrix exclusive distributor in Japan. Rorze’s software department has engineers on staff who are familiar with the SEMI FA standards and have used Cimetrix FA and tool control products on previous projects. Watch for more news as this relationship broadens to add new channels throughout Asia.

At SEMICON Japan, Rorze and Cimetrix demonstrated a new 450mm wafer capable vacuum platform. This platform was controlled by Cimetrix CIMControlFramework and was cycling both 300mm and 450mm wafers. It created quite a stir on the main aisle at SEMICON Japan due to the actual moving demonstration and discussions by ISMI about progress on industry usage of 450mm platforms. Please contact Rorze or Cimetrix for more information.

 

Topics: Equipment Control-Software Products, Partners, Doing Business with Cimetrix, Cimetrix Products

Got Licenses?

Posted by Cimetrix on Dec 15, 2009 1:32:00 PM

software licensesby Stephanie Sampson,
Project & Sales Coordinator

Need a license for a Cimetrix software product? Not sure how to go about getting one?  Well, let me share with you some quick and simple steps for requesting and receiving a license as efficiently as possible.

First, you will need a Purchase Order. Once you have that we would love to see it! Email or fax, can’t decide which way to send it? Either one of these will work:

Upon receipt of the Cimetrix software and Certificate of Authenticity (COA), it’s time to request your license file. The license file contains installation codes required to correctly install the software. You can send all of your license requests, transfers, or questions to licenses@cimetrix.com.

Please list your MAC ID and indicate one of the following to activate your license:

  • Purchase Order Number
  • Sales Order Number
  • Certificate of Authenticity Number

If a license transfer is what you are looking for instead, then please send your “Old” MAC ID along with your “New” MAC ID to complete the transfer.

If you are not sure where to find your MAC ID, then please use the following steps:

  1. Go to the “Start” menu on the computer you want to license
  2. Click “Run”
  3. Inside the Open box type “cmd” then press OK
  4. At this point a Command/DOS/Shell window should pop-up
  5. Type “ipconfig –all” Then press Enter
  6. You can either take a screen shot here or type in the information that corresponds to the
  7. Physical Address of the primary network card.

Now that we have all of your information your license file will be emailed to you within the one business day.

See, it’s almost as easy as 1..2..3! If you are still unsure about any of these steps, please feel free to contact us at licenses@cimetrix.com or call 801-256-6500.

 

Topics: Customer Support, Doing Business with Cimetrix, Cimetrix Products

A case for custom programming tools when creating equipment models

Posted by Cimetrix on Oct 13, 2009 8:00:00 AM

by Allyn Sullivan,
Software Engineer

I have recently worked with several customers who were in the process of building CIMPortal equipment models for their tools. Some were using the Equipment Model Developer (EMD) which ships with CIMPortal while others were programmatically building their models using the CxModel API. Working with both sets of customers, I saw a very real need for customers to develop programming tools to create equipment models instead of relying on the EMD alone.

Every model has a unique equipment configuration. Building an equipment model through the EMD is a laborious process. Each node of the equipment is added individually with a minimal amount of automation. Although suitable for those new to CIMPortal and initial model development, the EMD is not practical for building the many unique equipment models required for every tool configuration that a manufacturer makes.

Most manufacturers use a base tool to which they can add components to meet their customer's specification. Equipment configuration data can then be imported from the bill of materials (BoM), parts inventory, or other data from the manufacturing system of record. The model builder application can import this data (from a database or spreadsheet, for example) and use the CxModel API to generate several unique equipment models automatically. The application should be able to easily generate equipment models for any tool in the manufacturer's inventory.

Developing the proper tools that meet your individual needs is the most efficient way of creating equipment models for CIMPortal. You'll save time over using the EMD and have more consistent equipment models across tools.

Topics: EDA/Interface A, Programming Tools, Cimetrix Products

Interface A - Are we there yet?

Posted by Cimetrix on Sep 10, 2009 2:20:00 PM

by Doug Rust,
Director, Quality Customer Support & co-chair of the SEMI North America GEM300 Task Force

In April, the suite of SEMI software standards commonly referred to as "Interface A" turned 5 years old.

Coincidentally, also in April, the SEMI standards North America Information and Control Committee approved an important revision to these standards to incorporate many of the lessons learned from early implementations.

SEMATECH, through its subsidiary ISMI, for years has been consistent in communicating how important Interface A (a.k.a. - Equipment Data Acquisition - EDA) is to the current and future manufacturing automation needs of its member companies. This message was repeated again at an ISMI workshop I attended this last Spring. ISMI had explained that the SEMATECH member companies (which make up 50 percent of the worldwide chip market) wanted ISMI to focus on a smaller number of projects with short-term benefits for 2009. Interface A (EDA) is on this short list.

In support of the ISMI members' vision for a better quality data communication interface, Cimetrix has been actively developing Interface A software since before the standards were published with early prototypes based on draft documents back in 2002-2003. We have had a continuous product improvement program in place since 2004 for our CIMPortal product which implements the Equipment Data Acquisition standards on the server side. We had previews of our EDAConnect factory-side EDA product at SEMICONWest 2007 and launched the product later that year.

So, as I was sitting in the workshop listening to the speaker from ISMI say once again what an important enabling technology Interface A was for current and Next Generation Factories (NGF), I thought to myself, "I keep hearing ‘we need it, we need it'. I wonder why more companies aren't using it"?

Why do you think companies have been slow to deliver Interface A (EDA) solutions on their equipment and using it in their fabs?

Topics: Industry Highlights, EDA/Interface A, Cimetrix Products

Welcome to Cimetrix's new blog!

Posted by Cimetrix on Feb 17, 2009 8:32:00 AM

At Cimetrix, we thrive on customer interaction, continous improvement, and a passionate dedication to providing an elevated level of quality in both our products and services.  In an effort to solicit more feedback from our customers and colleagues, we will be launching a blog in the coming weeks. 

Readers can expect to see posts regarding industry trends and updates, product  & company announcements, tips for smooth implementation of the SEMI standards (SECS/GEM, GEM300, and EDA), and common incidents and how to avoid them.

Check back soon!

Topics: Doing Business with Cimetrix, Cimetrix Company Culture, Cimetrix Products