Background
The SEMI North America Diagnostic Data Acquisition (DDA) task force is part of the North America Information and Control Committee (I&CC or NA I&CC). This year the meeting that is normally held in conjunction with SEMICON West was held on Tuesday, July 14, 2020, and continued its activities in developing important SEMI standards. As co-leader of the NA DDA task force, I offer this blog as a summary of the current task force activities.
Freeze 3 Status
The primary responsibility of the DDA task force is the suite of Equipment Data Acquisition (EDA) standards, sometimes referred to as “Interface A.” Currently there are two version sets of EDA standards known as “Freeze 1” and “Freeze 2” which are both based on SOAP/XML over HTTP. The current activities are focused on defining the next EDA set (already designated “Freeze 3”) which is based on a binary protocol gRPC over HTTP. This technology, along with a number of other changes, promises to dramatically increase data collection throughput capacity.
Here is what has been completed so far:
Standard (Ballot) |
Ballot Status |
Lead |
E132 (6337) – Client Authorization and Authentication |
Published - 04/29/2019 |
Brian Rubow (Cimetrix) |
E138 (6336) – Specification for XML Semiconductor Common Components |
Published - 03/15/2019 |
Brian Rubow (Cimetrix) |
E134 (6335) – Data Collection Management |
Published – 03/29/2019 |
Inhyeok Paek (Link Genesis) |
E120 (6434) – Common Equipment Model (CEM) |
Published – 05/30/2019 |
Inna Skvortsova (SEMI) |
E145 (6436) – Classification for Measurement Unit Symbols in XML |
Published – 05/31/2019 |
Inna Skvortsova (SEMI) |
E178 (6300) – Guide for EDA Freeze Version |
Published – 01/10/2020 |
Mitch Sakamoto (ZAMA) |
E179 (6344A) – Specification for Protocol Buffers Common Components |
Published – 03/27/2020 |
Albert Fuchigami (PEER) |
Current Ballot Activity
The bulk of the “Freeze 3” work is still under active development. Here is a summary of the ballot activity as of the start of the meeting on Tuesday.
Standard (Ballot) |
Ballot Status |
Lead |
E125 (6527B) – Equipment Self Description (EqSD) |
Adjudication |
Brian Rubow (Cimetrix) |
E132 (6571B) – Client Authorization and Authentication |
Adjudication |
Mitch Sakamoto (ZAMA) |
E134 (6553B) – Data Collection Management |
Adjudication |
Brian Rubow (Cimetrix) |
E164 – EDA Common Metadata |
Development |
Alan Weber (Cimetrix) |
E125.2 (6345) – gRPC Binding for Equipment Self Description (EqSD) |
Development |
Albert Fuchigami (PEER) |
E132.2 (6346C) – gRPC Binding for Client Authorization and Authentication |
Adjudication |
Albert Fuchigami (PEER) |
E134.2 (6347) – gRPC Binding for Data Collection Management |
Development |
Albert Fuchigami (PEER) |
All of the ballots failed and will be reworked for Cycle 7 voting later this year. However, this was not unexpected, and a great of useful feedback was gathered in the process.
Getting Involved
For those interested in participating, it is easy to join SEMI standards activities. Anyone can register at www.semi.org/standardsmembership.
All SEMI task force ballot activities are logged at: http://downloads.semi.org/web/wstdsbal.nsf/TFOFandSNARFsbyCommittee?OpenView&Start=1&Count=1000&ExpandView
After joining the standards activities, anyone can get involved. The task forces post everything on the connected @ SEMI website https://connect.semi.org/home. The North America DDA task force community is called “Diagnostic Data Acquisition Task Force - North America”.
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