Industry News, Trends and Technology, and Standards Updates

EDA Standards Seeing Increasing Adoption Across the Industry

Posted by Alan Weber: Vice President, New Product Innovations on Sep 22, 2015 9:19:21 PM

As mentioned briefly in a previous posting, the adoption momentum for the SEMI EDA (Equipment Data Acquisition) suite of standards has picked up noticeably over the past 6 months, and a number of pilot projects are now underway at leading chip makers across the industry, especially in Asia. As these projects bear fruit, we expect to see explicit requirements for EDA interface capability in the purchase specifications of many more fabs in the coming months. But that’s just a start.

The early adopters of these standards who have now accumulated years of production experience clearly understand that the key to realizing the full manufacturing benefit of this technology lies in the structure and content of the equipment metadata models, which to date have been largely determined by the equipment suppliers themselves. The resulting diversity of EDA implementations is reminiscent of the situation that existed in the days before GEM, when every chip maker required their own particular “dialect” of SECS-II, and the equipment suppliers had to support a custom interface for each customer… not a pretty picture.

Luckily, the standards community recognized this problem early on, and addressed it via the Specification for EDA Common Metadata (SEMI E164). This standard effectively unifies the equipment models across the fab, regardless of process type or supplier, enabling the factory software developers to create generic manufacturing applications that “plug and play” with the equipment to address the problems that are common to all (status and productivity monitoring, material flow, resource utilization, etc.). 

EDA1.jpg

As a result, the next wave of factory implementations can directly leverage these lessons learned by requiring compliance to “Freeze 2, E164” level of the EDA standards suite, and focus their energies on new application development rather than supplier-specific custom integration software. Given the years of experience Cimetrix has dedicated both to the development of the EDA standards in the SEMI community and in providing product-based implementations on “both ends of the wire” (in other words, equipment and client/host side), we can support customers wherever they are in the implementation life cycle, from building awareness to initial purchase specification development to system architecture and application design to conformance and acceptance testing.

For more information about how we can help align your activities with this accelerating adoption process, please contact us… and stay tuned for more specifics on all the above!

For an introduction to EDA, download the presentation Interface A Overview: Characteristics, Benefits, and Applications.

Topics: Industry Highlights, Semiconductor Industry, EDA/Interface A

2015 SEMICON Taiwan Recap

Posted by Alan Weber: Vice President, New Product Innovations on Sep 8, 2015 9:41:00 AM

The 2015 SEMICON Taiwan was held at the Taipei Nangang Exhibition Center in the Nangang District of Taipei City, Taiwan September 2-4.  The event drew over 30,000 visitors from all over the world for the three-day event with nearly 1,500 exhibits from a diverse array of companies and organizations across the semiconductor industry.

Blog_pic_2_-_booth.jpg

Cimetrix exhibited at SEMICON Taiwan trade show for the first time, in conjunction with its newest Asian partner, Flagship International.

This turned out to be the 20th Anniversary of SEMICON Taiwan, so the mood was especially buoyant and the attendance brisk. SEMI also commemorated the event with a Gala Dinner at the Grand Hyatt on Wednesday night, and we were privileged to attend courtesy of our Flagship colleagues.

The president of Taiwan, Ma Ying-jeou, even made a guest appearance to thank the semiconductor industry for its contribution to Taiwan’s economic health. 

Shortly after the exhibition opened on Wednesday (Sept. 2), a couple of visitors from UMC showed up, and shared the latest work they’ve been doing with the Wait Time Waste (WTW) concepts that we had presented two years earlier. C.Y. Tiao and James Lin of UMC even made two presentations at the eMDC conference on this topic. 

From a standards perspective, this has now taken the form of SEMI E168, Specification for Product Time Measurement (PTM), and has been defined at the “time element” and supporting GEM/SECS message level for process equipment, automated material handling systems (AMHS), and material control systems (MCS). With the advent of SEMI E164 (EDA Common Metadata), these concepts are especially easy to implement, because all the events necessary to calculate the full suite of time elements are required by standard… but more on this is a later blog!

Since much of the world’s foundry capacity is in Taiwan, the equipment industry was well represented at the show, which included many of Cimetrix’ current customers as well as a few local prospects. As a result, Dave Faulkner and Kerry Iwamoto had a chance to visit a number of these firsthand.

Another highlight of the week for Cimetrix was participation in the eMDC (e-Manufacturing & Design Collaboration Symposium), where I made a presentation entitled “Data Fusion at the Source: Standards and Technologies for Seamless Sensor Integration” that addresses the challenges faced by process engineers in effectively using data from an increasing number of sources to analyze process behavior.

The basic idea is to handle the association of necessary context information (lot, substrate, product, layer, process, recipe, step, chamber, etc.) with the raw collected data as close to the source as possible, using a single, integrated model of the equipment and all related data sources. The equipment model that forms the foundation of the EDA/Interface A standards serves this purpose perfectly.

 

On a final related note, in visiting and talking with a number of the leading chip makers during the week, it seems that the adoption momentum for EDA is now building steadily, so we look forward to supporting this initiative across the value chain. Stay tuned for a late September post that will shed more light on this process!

Topics: SECS/GEM, Semiconductor Industry, Events

SEMICON Japan 2014

It was exciting to be at SEMICON Japan a couple of weeks ago. The show was in a new venue – Tokyo Big Sight; in previous years, it had been at the International Exhibition Halls & International Conference Hall in Tokyo.

 

Tokyo_Big_Sight

Tokyo Big Sight

I was especially interested in seeing some of our equipment supplier customers, since we have several new customers who have completed their systems and will ship products using Cimetrix software in 2015 using both our Interface A and SECS/GEM software.

We were well represented at the show. We had a large presence in the booths of our distributors in Japan.

Meiden_Booth_1

 

Meiden_Booth_2

Both Meidensha and Rorze had banks of computers set up to demonstrate Cimetrix software, and both booths were busy with demos.

Rorze_Booth

SEMICON Japan was first held in 1977, and is the largest of the SEMICON events held worldwide each year. This year, there were forums covering subjects such as:

  • Recent advances in 2.5D/3D ICs
  • TSVs in 2.5D and 3D
  • IoT (Internet of Things) and its application
  • Advanced Lithography
  • Design For Manufacturing (DFM)

You can read more about the event at SEMICON Japan.

Topics: Partners, Events, Global Services

Connecting GEM-Based Equipment to PLCs

Posted by Cimetrix on Nov 10, 2014 4:17:00 PM

The Cimetrix open source GEMBridge solution is now updated to use with Kepware Technologies KEPServerEX OPC platform. Cimetrix customers using CIMConnect and CIM300 can use GEMBridge to connect their PLC-controlled equipment to SECS/GEM and GEM 300 interfaces using an OPC-compliant interface.

Cimetrix announced this solution last week in a press release. With this solution, OEMs can send messages to and from programmable logic controllers to enable complete equipment control throughout the system. 

Kepware’s KEPServerEX is a flexible and scalable solution for connecting, managing, monitoring, and controlling diverse automation devices and software applications. Communications is managed through a robust platform that supports an array of open standards such as OPC, propriety communication protocols, API's, and various automation systems' interfaces. KEPServerEX enables improved operations and decision making throughout all levels of an organization.

Kepware CIMConnect resized 600

KEPServerEX provides the ability to consolidate data and information from various sources. This not only ensures consistency and reliability, but also reduces the number of Third-Party communication servers from which the end application must gather data. Furthermore, having a single source gather data for client applications reduces network traffic, device and system resource usage, and data inconsistencies. Instead, it provides a manageable and scalable platform for automation communications.

For more information, contact Cimetrix at info@cimetrix.com.

Topics: SECS/GEM, Cimetrix Products

Semiconductor Equipment Industry Posts Book-to-Bill Ratio of 0.94

Posted by Cimetrix on Nov 5, 2014 11:54:00 AM

The semiconductor industry may have seen a pause during the current growth cycle. For the first time in almost a year, the North America-based manufacturers of semiconductor equipment posted a book-to-bill ratio of less than parity. According to SEMI, there were $1.17 billion in orders worldwide in September 2014 (on a three-month average basis) and a book-to-bill ratio of 0.94. A book-to-bill of 0.94 means that $94 worth of orders were received for every $100 of product billed for the month.

The bookings figure of $1.17 billion is 12.9% below the final August 2014 level of $1.35 billion, and is 18.1% higher than the September 2013 order level of $992.8 million.

The three-month average of worldwide billings in September 2014 was $1.25 billion, which is 3.3% lower than in August, but is 22.5 % higher than the September 2013 billings level of $1.02 billion.

According to Denny McGuirk, president and CEO of SEMI "While order activity moderated, equipment spending this year is expected to be robust and remain on pace for double-digit year-over-year growth.”

Sept 2014 SEMI Book-to-Bill Chart

To read the complete report, visit http://semi.org/en/node/51796.

Topics: Semiconductor Industry

Semi Capital Equipment Spending Up More Than 17% in 2014

Posted by Cimetrix on Oct 23, 2014 2:42:00 PM

At Cimetrix, we are always keeping an eye on industry forecasts to see how industry analysts are analyzing market trends.

According to market research analysts at Gartner, the semiconductor capital equipment spending is expected to rise 17.1% in 2014.

There is good news for the wafer fabrication equipment sector. Even with a slight dip in 2016, Gartner is forecasting long term growth through 2018.


Gartner Forecast Wafer Fab Equipment Oct 2014

On the other hand, Gartner is forecasting a significant drop off in both die packaging and assembly equipment  and in automatic test equipment (ATE) spending in 2016. Gartner is forecasting wafer level packaging and assembly equipment spending will remain steady through 2018.

Gartner Forecast Back End Equipment Oct 2014 resized 600

To see the complete release, visit http://www.gartner.com/newsroom/id/2876317.

Topics: Semiconductor Industry

New SEMI Standards Automation Technology Committee Formed

Posted by Cimetrix on Oct 15, 2014 11:36:00 AM

James Amano of SEMI, in the October 2014 SEMI Standards Watch, announced a new Automation Technology Committee whose mission is to bring together automation standards for the semiconductor, PV, HB-LED, and other related industries. The first chapters will be in Europe and Japan.

The new committee replaces the PV Automation Committee. That committee developed standards based upon the SECS/GEM standards were used by the photovoltaic equipment industry. Interestingly enough, programmable logic controller (PLC) manufacturers are now considering using those standards because they are general enough to support flow-oriented manufacturing in other industries.

Fab System Host 1 resized 600

Previously, different industry segments such as PV, FPD, and HB-LED addressed their automation requirements in separate committees. Now, the new committee will combine interests and resources into a single group.

 

Topics: Industry Highlights, SECS/GEM, Photovoltaic/PV Standards

EDA/Interface A versus SECS/GEM SEMI Standards

Posted by Cimetrix on Oct 13, 2014 4:11:00 PM

With the growing interest in the use of SEMI EDA/Interface A standards, we have been getting a great deal of requests for the difference between Interface A and SECS/GEM

For a quick comparison, here is a table to showing some of the differences between Interface A and SECS/GEM:

EDA/Interface A versus SECS/GEM 
 

EDA/Interface A

SECS/GEM

Clients

Multiple

Single

Security

Can be configured for SSL-secured communications

HSMS is not secure

Equipment Model

You can upload a description of the logical structure of the equipment which includes parameters, events, and exceptions assigned to modules, subsystems, and I/O devices

Equipment information is found in a manual provided with the equipment, but often without the necessary context

Traces


Start & stop triggers that may include one or more events and/or exceptions  Traces begin via a SECS message and end when a specified number of samples are collected

Event Reports

Specify an event and an optional set of parameters to be collected when that event occurs

GEM host defines collections of parameters called reports, then links one or more reports to one or more events. The same report may be linked to multiple events if needed.

Data Collection Reports

E134 allows data collection to be throttled if data collection is reducing equipment performance below a specified level

GEM does not throttle back data collection

 

Additional Resources:

Topics: Industry Highlights, SECS/GEM, EDA/Interface A

Trends in Semiconductor Equipment Industry - August 2013 Update

When I posted a blog back in April, I wrote about the change in the industry outlook over the previous six months. In October 2012, the semiconductor equipment industry looked as if it was going to go into a decline, perhaps a steep decline, but by January 2013, the outlook looked brighter. By March 2013, industry analysts were predicting 2013 would be down, but not as badly as analysts originally thought. Still, TSMC was reporting they are adding capacity and Applied Materials announced they were on an up cycle. In addition, the forecast for 2014 was looking bright, with predictions of healthy growth.

As we move into the third quarter of 2013, the expectation is that semiconductor equipment total year revenues will decline somewhere between 1.5% and 7.5% from the $36.9 million in 2012. We are seeing equipment suppliers being a bit cautious about Q3 of this year. Several companies are offering guidance of no growth this quarter.

The forecast for 2014 continues to be upbeat, with SEMI expecting equipment revenue up by 21% and VLSI Research calling for a 27% increase. The majority of that growth will be in wafer processing equipment, which is expected to increase by 24% from 2013 levels.

Here is the chart provided by SEMI in July (see SEMI Sees 21% Increase in Chip Equipment Spending for 2014):

 SEMI Forecast - July 2013

Another encouraging sign is the SEMI North American book-to-bill ratio has remained above 1 for the past six months (see North American Semiconductor Equipment Industry Posts June 2013 Book-to-Bill Ratio of 1.10).

SEMI Book-to-Bill June 2011 to June 2013

North American Semiconductor Industry Bookings and Billings ($M)

The above chart shows that bookings have been going up since November 2012, and, since January 2013, more orders were received compared to products that were shipped, meaning that the industry is growing.

The question is “What is fueling this drive to build more capacity?” The answer is demand for mobile computing and communication. SIA (the Semiconductor Industry Association) announced worldwide sales of semiconductors in May 2013 of $24.70 billion, an increase of 4.6%. That is the largest sequential monthly increase in sales for the industry since March 2010.

IDC forecasts the mobile wireless communication segment will grow over 10% in 2013, and the consumer segment, including tablet computers, e-readers, set top boxes, and DVD recorders, will grow over 15% this year. Even automobiles are getting smarter, and semiconductor content will grow over 5% in vehicles this year (see IDC Forecasts Worldwide Semiconductor Revenue Will Grow 6.9% and Reach $320 Billion in 2013).

We are in a cyclical industry, and we know that what goes up must come down. If the analysts are correct, next year should be a robust year for semiconductor equipment makers. We will keep you posted on what we are seeing in the semiconductor equipment industry.

Topics: Semiconductor Industry

History of Semi Equipment Health Monitoring - Fingerprinting

Posted by Alan Weber: Vice President, New Product Innovations on May 31, 2013 3:12:00 PM

I had the privilege of speaking at the annual Advanced Process Control and Manufacturing (APCM) Europe conference in April of this year. The conference supports manufacturers, suppliers and scientific community of semiconductor, photovoltaic, LED, flat panel, MEMS, and other related industries. The topics are focused on current challenges and future needs of Advanced Process Control and Manufacturing Effectiveness. The theme of this year’s conference was From Reactive to Predictive - from SPC to Model-Based Process Control.

My presentation was entitled Fingerprinting and FDC: First Cousins in the Equipment Productivity Family. One of the areas I covered in that presentation was how the whole concept of fingerprinting came about.

I’ve written about Equipment Health Monitoring, also known as fingerprinting, previously – see my blog post about Fingerprinting at SEMICON West at SEMICON West Follow Up: ISMI Fingerprinting Project. While the term fingerprinting has only recently been applied to this technology, the use of this type of application goes back a decade to the advent of Equipment Engineering Systems (EES), when the first major implementation of that technology was in the Renesas factory in Naka, Japan.

The basic idea was that semiconductor manufacturers could learn a great deal by collecting detailed trace and event information from the equipment to understand the behavior of low-level mechanisms, with the assumption that if the low-level mechanisms were exhibiting proper behaviors, then the entire machine would be operating within its specifications. This is the fundamental idea behind fingerprinting.

 Fingerprinting History

Back in 2003, when Renesas was implementing their EES program, there were no good standards for collecting low-level, high-speed trace information, and so the Renesas engineers expended a great deal of effort generating custom interfaces to collect trace and event data they could then feed into a common database. However, as they pursued the effort, they showed what kinds of analysis of the collected data could give them insight into the performance of their fab’s equipment.

As this idea gained traction, Shigeru Kobayashi one of the industry thought leaders at Renesas, proposed through the ITRS and SEMATECH to create a program around the idea of using detailed trace information to improve the equipment quality over time. This suggestion triggered the inception of the EEQA (Enhanced Equipment Quality Assurance) program.

The basic idea of the EEQA program, as it was with EES, was to collect low-level trace information about equipment mechanisms. That data could be shared with the equipment suppliers to show them how the equipment was operating in a production situation in order to improve the design and performance of the machines over time.

The EEQA program lasted more than 3 years at ISMI. There were a number of studies regarding the specific information that equipment engineers and fab engineers could use to characterize different equipment mechanisms and components. There were even a couple of prototypes developed to show how that information could be collected, modeled, and visualized and reported. However, the structural problem with the program was that it placed expectations on the OEMs regarding the amount of data that would need to be collected (and the effort involved in enabling this) without clearly showing the benefit to these suppliers. Consequently, the EEQA program lost support and lay fallow for a while.

However, the basic ideas of EEQA were preserved and folded into a subsequent SEMATECH umbrella program called equipment health monitoring (EHM). However, the energy for the program happened when someone attached an intuitive label to this notion of characterizing a component with its raw data. People attached the term “fingerprint” to that basic model, and the idea of grouping these trace values into a fingerprinting model that would have a specific value that manufacturing can track over time made the basic idea easier to understand and support. When EEQA was re-characterized and re-labeled as fingerprinting, the concept, and understanding the benefit that accrues from collecting and analyzing low-level trace data, finally took hold.

There was one other vital step necessary for the program to catch on in people’s minds. Equipment suppliers and fabs realized that to do predictive maintenance, as well as other health monitoring activities, they needed the data that they could collect using fingerprinting. With the basic concept of a fingerprint understood, and the recognition of the real value that collecting and analyzing the data would provide, both the equipment suppliers and the semiconductor manufacturers began to recognize the need for Equipment Health Monitoring, or fingerprinting.

The key component of any successful fingerprinting program is in-depth equipment domain knowledge, whether that comes from the OEM or from extensive use of that equipment at a specific fab. The OEM is the best official source, but the program can be initiated by the end user as well.

I will discuss more about the presentation at APCM Europe in my next blog post. Stay tuned.

Topics: Semiconductor Industry